Bíró, Tamás and Renkó, József Bálint (2021) Design and Manufacture of a Microfluidic Cell To Be Used With a Spectroscopic Ellipsometer. ACTA MATERIALIA TRANSYLVANICA (EN), 4 (1). pp. 28-31. ISSN 2601-8799
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Abstract
In material testing and manufacturing processes, creating thin layers is a widely used method for structure development or for surface treatment purposes. Despite its widespread use, the physical background of the layer development process is currently under-researched. Its examination requires the development of procedures and tools that, in combination with the existing tools, can help to understand these processes. The development of microfluidic cells is a way to solve this problem. In this paper, a newly developed microfluidic cell is presented, which also offers a solution to several problems encountered when using previous designs.
| Item Type: | Article |
|---|---|
| Subjects: | T Technology / alkalmazott, műszaki tudományok > T2 Technology (General) / műszaki tudományok általában |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | Zsolt Baráth |
| Date Deposited: | 07 Oct 2022 11:17 |
| Last Modified: | 07 Oct 2022 11:17 |
| URI: | http://real.mtak.hu/id/eprint/151268 |
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