Szilasi, Szabolcs Zoltán and Juhász, Laura (2018) Selective etching of PDMS: Etching as a negative tone resist. APPLIED SURFACE SCIENCE, 447. pp. 697-703. ISSN 0169-4332
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Official URL: https://doi.org/10.1016/j.apsusc.2018.04.006
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > Q1 Science (General) / természettudomány általában |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 07 Mar 2023 14:23 |
| Last Modified: | 07 Mar 2023 14:23 |
| URI: | http://real.mtak.hu/id/eprint/161659 |
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