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Striations in electronegative capacitively coupled radio-frequency plasmas: Analysis of the pattern formation and the effect of the driving frequency

Liu, Y.X. and Korolov, I. and Schüngel, E. and Wang, Y.N. and Donkó, Zoltán (2017) Striations in electronegative capacitively coupled radio-frequency plasmas: Analysis of the pattern formation and the effect of the driving frequency. PLASMA SOURCES SCIENCE & TECHNOLOGY, 26 (5). ISSN 0963-0252

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Item Type: Article
Subjects: Q Science / természettudomány > Q1 Science (General) / természettudomány általában
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 18 May 2023 15:31
Last Modified: 18 May 2023 15:31
URI: http://real.mtak.hu/id/eprint/165606

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