Neumann, Péter Lajos and Radó, János and Bozorádi, János Márk and Volk, János (2023) AlGaN/GaN Heterostructure Based 3-Dimensional Force Sensors. MICRO AND NANO ENGINEERING, 19. pp. 1-8. ISSN 2590-0072
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2023_Neumann_AlGaN-GaN-Force-sensor_UNE.pdf Available under License Creative Commons Attribution. Download (6MB) | Preview |
Official URL: https://doi.org/10.1016/j.mne.2023.100198
| Item Type: | Article |
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| Subjects: | T Technology / alkalmazott, műszaki tudományok > TJ Mechanical engineering and machinery / gépészmérnöki tudományok |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 22 May 2023 07:31 |
| Last Modified: | 22 May 2023 07:31 |
| URI: | http://real.mtak.hu/id/eprint/165698 |
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