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Quantitative depth profiling of Si1-xGex structures by time-of-flight secondary ion mass spectrometry and secondary neutral mass spectrometry

Drozdov, M. N. and Drozdov, Y. N. and Csík, Attila and Novikov, A. V. and Vad, Kálmán (2016) Quantitative depth profiling of Si1-xGex structures by time-of-flight secondary ion mass spectrometry and secondary neutral mass spectrometry. THIN SOLID FILMS, 607. pp. 25-31. ISSN 0040-6090

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Item Type: Article
Subjects: Q Science / természettudomány > Q1 Science (General) / természettudomány általában
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 11 Jul 2023 04:33
Last Modified: 11 Jul 2023 04:33
URI: http://real.mtak.hu/id/eprint/169344

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