Drozdov, M. N. and Drozdov, Y. N. and Csík, Attila and Novikov, A. V. and Vad, Kálmán (2016) Quantitative depth profiling of Si1-xGex structures by time-of-flight secondary ion mass spectrometry and secondary neutral mass spectrometry. THIN SOLID FILMS, 607. pp. 25-31. ISSN 0040-6090
|
Text
1701.01612.pdf Available under License Creative Commons Attribution. Download (422kB) | Preview |
Official URL: https://doi.org/10.1016/j.tsf.2016.03.049
Item Type: | Article |
---|---|
Subjects: | Q Science / természettudomány > Q1 Science (General) / természettudomány általában |
SWORD Depositor: | MTMT SWORD |
Depositing User: | MTMT SWORD |
Date Deposited: | 11 Jul 2023 04:33 |
Last Modified: | 11 Jul 2023 04:33 |
URI: | http://real.mtak.hu/id/eprint/169344 |
Actions (login required)
Edit Item |