Wilczek, S. and Trieschmann, J. and Eremin, D. and Brinkmann, R. P. and Schulze, J. and Derzsi, Aranka and Korolov, Ihor and Hartmann, Péter and Donkó, Zoltán (2016) Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas. PHYSICS OF PLASMAS, 23 (6). ISSN 1070-664X
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1507.05505.pdf Available under License Creative Commons Attribution. Download (2MB) | Preview |
Official URL: https://doi.org/10.1063/1.4953432
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > Q1 Science (General) / természettudomány általában |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 16 Jul 2023 10:32 |
| Last Modified: | 16 Jul 2023 10:32 |
| URI: | http://real.mtak.hu/id/eprint/169812 |
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