Design, fabrication, and characterization of picowell arrays on cyclic olefin copolymer surfaces generated with a 10.5 MeV N4+ ion microbeam

Bányász, I. and Rajta, I. and Havránek, V. and Mackova, A. and Laki, A. J. and Kellermayer, M. S. Z. and Szittner, Z. and Kurunczi, S. and Novák, Sz. and Székács, I. and Horváth, R. and Fried, M. and Nagy, G. U. L. (2023) Design, fabrication, and characterization of picowell arrays on cyclic olefin copolymer surfaces generated with a 10.5 MeV N4+ ion microbeam. APPLIED PHYSICS LETTERS, 123 (5). No-053701. ISSN 0003-6951

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Abstract

Handling of picoliter-to-nanoliter-scale volumes and objects has increasing importance in life sciences. This is the volume scale of cell extractions and individual living cells. Here, we introduce a method of generating a picoliter-scale device by direct writing of picowell arrays on a ZEONOR™ copolymer surface with high-energy medium-mass ion microbeam. Arrays of various microstructures were written in the sample using a microbeam of 10.5 MeV N4+ ions at various implanted ion fluences. The best array was obtained by implantation of annuli of 10 and 11 μm of inner and outer diameters with a fluence of 7.8 × 1012 ions/cm2.

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