Olasz, Dániel and Kis, Viktória and Cora, Ildikó and Németh, Miklós and Sáfrán, György (2024) High-Throughput Micro-Combinatorial TEM Phase Mapping of the DC Magnetron Sputtered YxTi1−xOy Thin Layer System. NANOMATERIALS, 14 (11). No.-925. ISSN 2079-4991
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Abstract
High-throughput methods are extremely important in today’s materials science, especially in the case of thin film characterization. The micro-combinatorial method enables the deposition and characterization of entire multicomponent thin film systems within a single sample. In this paper, we report the application of this method for the comprehensive TEM characterization of the Y-Ti-O layer system. Variable composition samples (YxTi1−xOy) were prepared by dual DC magnetron sputtering, covering the entire (0 ≤ x ≤ 1) concentration range. The structure and morphology of phases formed in both as-deposited and annealed samples at 600, 700, and 800 °C were revealed as a function of Y-Ti composition (x). A comprehensive map showing the appropriate amorphous and crystalline phases, and their occurrence regions of the whole Y-Ti-O layer system, was revealed. Thanks to the applied method, it was shown with ease that at the given experimental conditions, the Y2Ti2O7 phase with a pyrochlore structure forms already at 700 °C without the TiO2 and Y2O3 by-phases, which is remarkably lower than the required temperature for most physical preparation methods, demonstrating the importance and benefits of creating phase maps in materials science and technology.
Item Type: | Article |
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Uncontrolled Keywords: | Y-Ti-O thin films, micro-combinatory, pyrochlore structure, TEM, phase map, reactive DC sputtering |
Subjects: | Q Science / természettudomány > QC Physics / fizika > QC173.4 Material science / anyagtudomány |
SWORD Depositor: | MTMT SWORD |
Depositing User: | MTMT SWORD |
Date Deposited: | 06 Jun 2024 08:47 |
Last Modified: | 06 Jun 2024 08:47 |
URI: | https://real.mtak.hu/id/eprint/196671 |
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