Non-Stoichiometric Titanium-Oxide Gate Electrodes for EGFET Based pH Sensors

Szomor, Zsombor and Bató, Lilia and Stágl, Silvia and Hakkel, Orsolya and Sulyok, Attila and Dücső, Csaba and Baji, Zsófia and Fürjes, Péter (2024) Non-Stoichiometric Titanium-Oxide Gate Electrodes for EGFET Based pH Sensors. PROCEEDINGS, 97 (1). No.-193. ISSN 2504-3900

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Abstract

A compact pH measuring electrochemical sensor module was developed for Smart Multi-Well Plates (SMWP) applicable for highly parallelized cell culture analysis using incorporated Organ-on-Chip devices. A specific electronic architecture was designed and manufactured containing an extended gate field effect transistor as the transducer device. Electrochemical electrodes were functionalized using pH sensitive metal-oxides and applied as the gate material. The composition and the related pH sensitivity of differently deposited materials were characterized and the suitability of ALD-deposited, non-stoichiometric titanium oxide (TiOx) for sensitive pH measurement was verified showing excellent responses close to the ideal Nernstian slope (59 mV/pH).

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