Resolution enhancement methods in optical microscopy for dimensional optical metrology

Nouri, Mohammad and Olivero, Paolo and Kroker, Stefanie and Käseberg, Tim and Ruo-Berchera, Ivano and Bodermann, Bernd and Tyagi, Himanshu and Roy, Deb and Mukherjee, Deshabrato and Siefke, Thomas and Hansen, Poul Erik and Rømer, Astrid Tranum and Valtr, Miroslav and Aprà, Pietro and Petrik, Péter (2025) Resolution enhancement methods in optical microscopy for dimensional optical metrology. JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 21 (1). No. 7. ISSN 1990-2573

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Abstract

In this paper, we discuss several enhancement approaches to increase the resolution and sensitivity of optical microscopy as a tool for dimensional nanometrology. Firstly, we discuss a newly developed through-focus microscopy technique providing additional phase information from the afocal images to increase the nanoscale sensitivity of classical microscopy. We also explore different routes to label-free or semiconductor compatible labelling super-resolution microscopy suitable for a broad range of technical applications. We present initial results from, a new wide-field super-resolution imaging technique enabled by Raman scattering. In addition, we discuss super-resolution imaging using NV centres in nano-diamonds as labels and their application in future reference standards.

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