Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

Masheyeva, Ranna and Dzhumagulova, Karlygash N. and Myrzaly, Murat and Schulze, Julian and Donkó, Zoltán (2021) Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas. AIP ADVANCES, 11. No. 075024. ISSN 2158-3226

Preview

Text AIPADV_2021_Masheyeva_Bias.pdf - Published Version Available under License Creative Commons Attribution. Download (7MB) | Preview

Abstract

In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function of the electrode surface characteristics. For the latter, we consider and vary the coefficients that characterize the elastic reflection of electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on particle-in-cell/Monte Carlo collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to slightly affect the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics.

Actions (login required)

Edit Item