Electron density measurements and calculations in a helium capacitively-coupled radio-frequency plasma

Bentz, Brian and Hartmann, Péter and Derzsi, Aranka and Youngman, Kevin and Donkó, Zoltán (2025) Electron density measurements and calculations in a helium capacitively-coupled radio-frequency plasma. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 34. No. 025007. ISSN 0963-0252 (print); 1361-6595 (online)

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Abstract

We report a comparison of inferred electron density (ne) in a He capacitively-coupled plasma, deduced from laser-collision induced fluorescence measurements, with values computed using a hybrid simulation framework based on particle-in-cell/Monte Carlo collisions simulations and a fluid model for excited He atoms. The studies were carried out for gas pressures between 50 mTorr and 1000 mTorr and peak-to-peak radio-frequency (13.56 MHz) voltages between 150 V and 350 V, in a highly symmetric source equipped with plane-parallel electrodes. A good agreement is found between the experimental and modeling results for ne except at the lowest operating voltages and gas pressures. The (effective) electron temperature (Te) values derived by the two methods agree as well reasonably within the plasma bulk. The simulation results are used to compare the density distributions of He+ and various He excited levels and their major populating and de-populating channels at 100 mTorr and 1000 mTorr.

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