Lábár, János and Cora, Ildikó and Pécz, Béla and Azarov, Alexander and Kuznetsov, Andrej (2026) Local deformations quantified with the common sublattice method. NANOSCALE, in pre. ISSN 2040-3364
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Abstract
Measurement of strain in epitaxial layers frequently faces the problem of localizing “perfectly” unstrained regions to use as a reference for the whole structure. Here, we develop a method for deducing such references in the unstrained substrate (with one crystal structure) to determine the local lattice deformations in the layer (with another crystal structure). The method works if there is a common sublattice in the layer and the substrate, so that the deviations from it may be used to interrelate the experimentally recorded data. The proof-of-concept is obtained using samples of cubic γ-Ga2O3 layers on a monoclinic β-Ga2O3 substrate, confirming that the new method overcomes several limitations of HRTEM-based methods. The precision of the method is ∼0.5% in strain values.
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika T Technology / alkalmazott, műszaki tudományok > T2 Technology (General) / műszaki tudományok általában |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 04 Jan 2026 11:00 |
| Last Modified: | 04 Jan 2026 11:13 |
| URI: | https://real.mtak.hu/id/eprint/231257 |
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