Composition-dependent structural and optical properties of combinatorially deposited, RF sputtered gallium oxynitride layers

Gajdics, Marcell and Cora, Ildikó and Kolonits, Tamás and Sáfrán, György and Szilágyi, E. and Zolnai, Zsolt and Pécz, Béla (2026) Composition-dependent structural and optical properties of combinatorially deposited, RF sputtered gallium oxynitride layers. VACUUM, 247. No. -115133. ISSN 0042-207X

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Abstract

Gallium oxynitride thin films were deposited by reactive RF sputtering from a liquid Ga target in a working gas mixture of argon, oxygen and nitrogen, with changing oxygen proportion. A combinatorial deposition method was applied that resulted in Ga-O-N samples of varying composition and enabled the characterization of material properties with high throughput over a wide composition range. The optical properties of the films were determined by spectroscopic ellipsometry, while X-ray diffraction and transmission electron microscopy were applied for structural characterization. The composition (measured by energy dispersive spectroscopy and elastic recoil detection analysis), structure and morphology of the films depended on the deposition conditions, especially the actual oxygen flow rate. The dependence of the refractive index and the optical gap on the elemental composition was determined and their values were plotted in ternary Ga-O-N composition diagrams. The same optical properties can occur for different compositions. It was shown that by varying the composition, the optical properties of gallium oxynitride films can be tuned.

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