CHARACTERIZATION OF RF AND DC MAGNETRON REACTIVE SPUTTERED TiO 2 THIN FILMS FOR GAS SENSORS

YORDANOV, R. and Boyadjiev, Stefan Ivanov and GEORGIEVA, V. (2014) CHARACTERIZATION OF RF AND DC MAGNETRON REACTIVE SPUTTERED TiO 2 THIN FILMS FOR GAS SENSORS. DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES, 9 (2). pp. 467-474. ISSN 1842-3582

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Abstract

This study presents the technology for prep aring and characterization of titanium oxide thin films with proper ties suitable for gas sensors. For preparing the samples the reactive radio frequency (RF) and direct current (DC) magnetron sputtering methods were used. The composition and microstructure of the films were studied by X-ray photoelectron spectroscopy (XPS), X-ray diff raction (XRD) and Raman spectroscopy, the surface of the films was observed applying high-resolution scanning electron microscopy (SEM). For measuring the thickness and identifying the refractive indices of the films laser ellipsometry was used. The research was focuse d on the sensing behavior of the sputtered titania thin films applying quartz crystal microbalance (QCM) method, which allows detection of mass changes in the nanogram range. Prototype QCM sensors with TiO 2 thin films were made by our team and tested for sensitivity to NH 3 and NO 2 . These films even in as-deposited state and without heating th e substrates show good sensitivity. Additional thermal treatment is not necessary, making manufacturing of QCM gas sensor simple and cost-effective, as it is fully compatible with the technology for producing the initial resonator. The sorption is fully reversible and the studied TiO 2 films are stable, which makes them capable for meas urements for long terms.

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