Petrik, Péter and Kumar, N. and Fried, Miklós and Fodor, Bálint and Juhász, György (2015) Fourier ellipsometry - An ellipsometric approach to Fourier scatterometry. JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 10. p. 15002. ISSN 1990-2573
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manusc_eosam_15002_Fourier_u.pdf Download (1MB) | Preview |
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QC Physics / fizika > QC02 Optics / fénytan |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 19 Jun 2015 11:30 |
| Last Modified: | 19 Jun 2015 11:30 |
| URI: | http://real.mtak.hu/id/eprint/24879 |
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