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Chemical Vapor Deposition of Boron Nitride Thin Films on SiC

Chubarov, Mihail and Pedersen, Henrik and Högberg, H. and Garbrecht, Magnus and Czigány, Zsolt (2015) Chemical Vapor Deposition of Boron Nitride Thin Films on SiC. MATERIALS SCIENCE FORUM, 821-82. pp. 990-994. ISSN 0255-5476

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 13 Jul 2015 08:30
Last Modified: 13 Jul 2015 08:30
URI: http://real.mtak.hu/id/eprint/25287

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