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Determination of the density of silicon–nitride thin films by ion-beam analytical techniques (RBS, PIXE, STIM)

Huszank, Robert and Csedreki, László and Kertész, Zsófia and Török, Zs. (2016) Determination of the density of silicon–nitride thin films by ion-beam analytical techniques (RBS, PIXE, STIM). JOURNAL OF RADIOANALYTICAL AND NUCLEAR CHEMISTRY, 306 (1). pp. 341-346. ISSN 0236-5731 (print), 1588-2780 (online)

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
Depositing User: Dr Zsófia Kertész
Date Deposited: 25 Sep 2015 04:31
Last Modified: 06 Jul 2016 16:53
URI: http://real.mtak.hu/id/eprint/27791

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