Proton beam lithography in negative tone liquid phase PDMS polymer resist

Huszank, Robert and Rajta, István and Cserháti, Csaba (2015) Proton beam lithography in negative tone liquid phase PDMS polymer resist. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 348. pp. 213-217. ISSN 0168-583X

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Official URL: http://dx.doi.org/10.1016/j.nimb.2014.12.053

Item Type:	Article
Subjects:	Q Science / természettudomány > QC Physics / fizika
Depositing User:	Dóra Zolnai
Date Deposited:	29 Sep 2015 06:43
Last Modified:	29 Sep 2015 06:43
URI:	http://real.mtak.hu/id/eprint/29235

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