Petrik, Péter and Fodor, Bálint and Agócs, Emil and Kozma, Péter and Nádor, Judit and Juhász, György and Major, Csaba (2015) Methods for optical modeling and cross-checking in ellipsometry and scatterometry. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 9526. pp. 1-11. ISSN 0277-786X (Unpublished)
|
Text
Method_ms_petrik_spie2015_u.pdf Download (558kB) | Preview |
Official URL: http://dx.doi.org/10.1117/12.2184833
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika > QC02 Optics / fénytan |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 12 Oct 2015 08:45 |
| Last Modified: | 13 Oct 2015 07:15 |
| URI: | http://real.mtak.hu/id/eprint/29701 |
Actions (login required)
 |
Edit Item |
