Agócs, Emil and Bodermann, Brend and Burger, Sven and Dai, Gaoliang and Endres, Johannes (2015) Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 9556. p. 955610. ISSN 0277-786X
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Official URL: https://dx.doi.org/10.1117/12.2190409
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QC Physics / fizika > QC02 Optics / fénytan |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 21 Oct 2015 09:44 |
| Last Modified: | 21 Oct 2015 09:44 |
| URI: | http://real.mtak.hu/id/eprint/29896 |
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