Contacting ZnO Individual Crystal Facets by Direct Write Lithography

Petkov, N. and Volk, János and Erdélyi, Róbert and Lukács, István Endre and Nagata, T. (2016) Contacting ZnO Individual Crystal Facets by Direct Write Lithography. ACS APPLIED MATERIALS AND INTERFACES, 8 (36). pp. 23891-23898. ISSN 1944-8244

[img] Text
Restricted to Repository staff only

Download (5MB) | Request a copy


Many advanced electronic devices take advantage of properties developed at the surface facets of grown crystals with submicrometer dimensions. Electrical contacts to individual crystal facets can make possible the investigations of facet-dependent properties such as piezoelectricity in ZnO or III-nitride crystals having noncentrosymmetric structure. However, a lithography-based method for developing contacts to individual crystal facets with submicrometer size has not yet been demonstrated. In this report we study the use of electron beam-induced deposition (EBID), a direct write lithography method, for contacting individual facets of ZnO pillars within an electron microscope. Correlating structural and in situ deposition and electrical data, we examine proximity effects during the EBID and evaluate the process against obtaining electrically insulated contact lines on neighboring and diametrically opposite ZnO facets. Parameters such as incident beam energy geometry and size of the facets were investigated with the view of minimizing unwanted proximity broadening effects. Additionally, we show that the EBID direct write method has the required flexibility, resolution, and minimized proximity deposition for creating prototype devices. The devices were used to observe facet-dependent effects induced by mechanical stress on single ZnO pillar structures. © 2016 American Chemical Society.

Item Type: Article
Uncontrolled Keywords: crystal structure; Incident beam energy; Electrical testing; Electrical contacts; Direct-write methods; Direct-write lithography; Zinc oxide; stresses; Piezoelectricity; Piezoelectric devices; Lithography; Electron beams; DEPOSITION; Crystallography; ZnO pillars; proximity deposition; Piezoelectric sensors; in situ electrical testing; facet-dependent; electron beam-induced deposition
Subjects: Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia
Depositing User: MTMT SWORD
Date Deposited: 19 Oct 2016 13:35
Last Modified: 19 Oct 2016 13:35

Actions (login required)

Edit Item Edit Item