Morphological investigation of porous samples by resonant backscattering spectrometry

Pászti, Ferenc and Szilágyi, Edit and Horváth, Zsolt Endre and Manuaba, Asrama and Battistig, Gábor and Hajnal, Zoltán and Vázsonyi, Éva (1998) Morphological investigation of porous samples by resonant backscattering spectrometry. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 136-38. pp. 533-539. ISSN 0168-583X

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Abstract

When performing backscattering spectroscopy measurements slightly above the energy when a sharp resonance exists in the elastic scattering cross section a characteristic resonance peak appears in the energy spectra of the backscattered particles. Unlike homogeneous samples where the position and width of this peak are mainly determined by the experimental set-up (incident energy, resonance width, etc.) for porous materials the peak width depends on the structure of the sample. This effect is caused by fluctuations in the stopping power along the trajectories of incident and scattered ions. Using the 3045 keV resonance in the O-16(alpha, alpha)O-16 reaction for analysing oxidised porous silicon samples, it was demonstrated both experimentally and theoretically that: (i) the widening of the resonance peak is easily observable, (ii) it is closely related to the actual morphology of the samples and (iii) it can be applied to determine morphological details, as porosity, average pore diameter and anisotropy of the pore directions.

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