Coupling effects of driving frequencies on the electron heating in electronegative capacitive dual-frequency plasmas

Derzsi, Aranka and Donkó, Zoltán and Schulze, Julian (2013) Coupling effects of driving frequencies on the electron heating in electronegative capacitive dual-frequency plasmas. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 46. pp. 1-5. ISSN 0022-3727

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Abstract

The coupling effects of low-frequency (LF) and high-frequency (HF) driving sources on plasma parameters and electron heating dynamics are investigated in low-pressure electronegative capacitive discharges. Kinetic particle simulations reveal frequency coupling mechanisms different from those characteristic of electropositive discharges operated in α- and/or γ -mode due to the presence of the drift-ambipolar electron heating mode in electronegative plasmas. Here, the LF component affects the electron heating at the collapsing sheath and inside the plasma bulk, having consequences on the separate control of ion properties and the electronegativity of the plasma.

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