Petrik, Péter (1999) Characterization of polysilicon thin films using in situ and ex situ spectroscopic ellipsometry. PhD thesis, Budapesti Műszaki Egyetem ; MTA MFA.
|
Text
petrik_phd.pdf Download (4MB) | Preview |
| Item Type: | Thesis (PhD) |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| Depositing User: | Andrea Bolgár |
| Date Deposited: | 15 Jul 2013 14:20 |
| Last Modified: | 05 Apr 2023 06:26 |
| URI: | http://real.mtak.hu/id/eprint/5953 |
Actions (login required)
 |
Edit Item |
