Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems

Udvardi, Péter and Radó, János and Straszner, András and Ferencz, János and Hajnal, Zoltán (2017) Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems. MICROMACHINES, 8 (10). pp. 1-13. ISSN 2072-666X


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Fully implantable, self-powered hearing aids with no external unit could significantly increase the life quality of patients suffering severe hearing loss. This highly demanding concept, however, requires a strongly miniaturized device which is fully implantable in the middle/inner ear and includes the following components: frequency selective microphone or accelerometer, energy harvesting device, speech processor, and cochlear multielectrode. Here we demonstrate a low volume, piezoelectric micro-electromechanical system (MEMS) cantilever array which is sensitive, even in the lower part of the voice frequency range (300–700 Hz). The test array consisting of 16 cantilevers has been fabricated by standard bulk micromachining using a Si-on-Insulator (SOI) wafer and aluminum nitride (AlN) as a complementary metal-oxide-semiconductor (CMOS) and biocompatible piezoelectric material. The low frequency and low device footprint are ensured by Archimedean spiral geometry and Si seismic mass. Experimentally detected resonance frequencies were validated by an analytical model. The generated open circuit voltage (3–10 mV) is sufficient for the direct analog conversion of the signals for cochlear multielectrode implants.

Item Type: Article
Uncontrolled Keywords: Energy harvesting; finite element analysis; micro-electromechanical system (MEMS); piezoelectric cantilever; Aluminum nitride (AlN); Archimedean spiral; Frequency selectivity; cochlear implant; artificial basilar membrane
Subjects: Q Science / természettudomány > QC Physics / fizika
Depositing User: MTMT SWORD
Date Deposited: 25 Oct 2017 10:17
Last Modified: 25 Oct 2017 10:17

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