The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures

Horváth, Benedek and Daksha, Manaswi and Korolov, Ihor and Derzsi, Aranka and Schulze, Julian (2017) The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures. Plasma Sources Science and Technology. ISSN 0963-0252 ; ESSN: 1361-6595

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Official URL: https://doi.org/10.1088/1361-6595/aa963d

Item Type:	Article
Subjects:	Q Science / természettudomány > QC Physics / fizika
Depositing User:	Dr Aranka Derzsi
Date Deposited:	01 Oct 2018 10:50
Last Modified:	01 Oct 2018 10:51
URI:	http://real.mtak.hu/id/eprint/86270

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