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The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas

Horváth, Benedek and Schulze, Julian and Donkó, Zoltán and Derzsi, Aranka (2018) The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas. Journal of Physics D: Applied Physics, 51. p. 355204. ISSN 1361-6463

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
Depositing User: Dr Aranka Derzsi
Date Deposited: 01 Oct 2018 10:57
Last Modified: 01 Oct 2018 10:57
URI: http://real.mtak.hu/id/eprint/86326

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