Ehiasarian, A. P. and Vetushka, A. and Gonzalvo, Y. Aranda and Sáfrán, György and Székely, Lajos and Barna B., Péter (2011) Influence of high power impulse magnetron sputtering plasma ionization on the microstructure of TiN thin films. JOURNAL OF APPLIED PHYSICS, 109 (10). ISSN 0021-8979
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Official URL: https://doi.org/10.1063/1.3579443
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 14 Feb 2019 09:54 |
| Last Modified: | 14 Feb 2019 09:54 |
| URI: | http://real.mtak.hu/id/eprint/91290 |
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