Zommer, Ludomir and Jablonski, Alexander and Kotysh, László and Sáfrán, György and Menyhárd, Miklós (2010) Simulation and measurement of AES depth profiles; a case study of the C/Ta/C/Si system. Surface Science, 604 (7-8). pp. 633-640. ISSN 0039-6028
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Official URL: https://doi.org/10.1016/j.susc.2010.01.007
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | RESOLUTION; CARBON; sputtering; ion bombardment; Tantalum; Auger electron spectroscopy; Ion-solid interactions; Computer simulations; |
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 14 Feb 2019 09:57 |
| Last Modified: | 14 Feb 2019 09:57 |
| URI: | http://real.mtak.hu/id/eprint/91291 |
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