Magnetron sputtered TiC/a:C nanocomposite thin films: Deposition parameters vs. properties

Balázsi, Katalin (2019) Magnetron sputtered TiC/a:C nanocomposite thin films: Deposition parameters vs. properties. VACUUM, 164. pp. 121-125. ISSN 0042-207X

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Abstract

Titanium carbide/amorphous carbon (TiC/a:C) thin films have been extensively investigated in the past due to their wide applications in technology and industry. One of the most used preparation methods is a magnetron sputtering which provides a great flexibility and possibility for preparation of thin films with various structures. In this work, the effect of deposition temperature and Ti content on structure and mechanical properties of sputtered TiC/a:C coatings was studied. In the case of films with fully bounded Ti ions and columnar structure, the best mechanical properties were found. These films may be used as passivation layers for different applications because of their extremelly chemical stability and excellent mechanical properties.

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