Material dependent modeling of secondary electron emission coefficients and its effects on PIC/MCC simulation results of capacitive RF plasmas

Daksha, Manaswi and Derzsi, Aranka and Mujahid, Z. and Schulenberg, David and Berger, Birk and Donkó, Zoltán and Schulze, Julian (2019) Material dependent modeling of secondary electron emission coefficients and its effects on PIC/MCC simulation results of capacitive RF plasmas. Plasma Sources Science and Technology, 28. 034002. ISSN 0963-0252 ; ESSN: 1361-6595

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Official URL: https://doi.org/10.1088/1361-6595/ab094f

Item Type:	Article
Subjects:	Q Science / természettudomány > QC Physics / fizika
Depositing User:	Dr Aranka Derzsi
Date Deposited:	13 Sep 2019 10:57
Last Modified:	13 Sep 2019 11:14
URI:	http://real.mtak.hu/id/eprint/99204

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