Derzsi, Aranka and Horváth, Benedek and Korolov, Ihor and Donkó, Zoltán and Schulze, Julian (2019) Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms. JOURNAL OF APPLIED PHYSICS, 126. 043303. ISSN 0021-8979
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Official URL: https://doi.org/10.1063/1.5100508
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| Depositing User: | Dr Aranka Derzsi |
| Date Deposited: | 13 Sep 2019 10:08 |
| Last Modified: | 30 Jul 2020 23:15 |
| URI: | http://real.mtak.hu/id/eprint/99210 |
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