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Cross sectional complex structure analysis is a key issue of thin film research: A case study on the preferential orientation crossover in TiN thin films

Barna, Péter B. and Biro, D. and Hasaneen, M. F. and Székely, Lajos and Menyhárd, Miklós and Sulyok, Attila and Horváth, Zsolt Endre and Pekker, P. and Dódony, István and Radnóczi, György (2019) Cross sectional complex structure analysis is a key issue of thin film research: A case study on the preferential orientation crossover in TiN thin films. THIN SOLID FILMS, 688. No.-137478. ISSN 0040-6090

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 14 Sep 2019 07:53
Last Modified: 14 Sep 2019 07:53
URI: http://real.mtak.hu/id/eprint/99316

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