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Items where Author is "Cascino, Salvatore"

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Galizia, Bruno and Fiorenza, Patrick and Schilirò, Emanuela and Pécz, Béla and Fogarassy, Zsolt and Greco, Giuseppe and Saggio, Mario and Cascino, Salvatore and Lo Nigro, Raffaella and Roccaforte, Fabrizio (2024) Towards Aluminum Oxide/Aluminum Nitride Insulating Stacks on 4H-SiC by Atomic Layer Deposition. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING : FUNCTIONAL MATERIALS FOR (OPTO)ELECTRONICS, SENSORS, DETECTORS, AND GREEN ENERGY, 174. No.-108244. ISSN 1369-8001 (print); 1873-4081 (online)

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