Items where Author is "Greczynski, G."

Schmidt, S. and Czigány, Zsolt and Wissting, J. and Greczynski, G. and Janzén, E. (2016) A comparative study of direct current magnetron sputtering and high power impulse magnetron sputtering processes for CNx thin film growth with different inert gases. Diamond and Related Materials, 64. pp. 13-26. ISSN 0925-9635

Schmidt, S. and Goyenola, C. and Gueorguiev, G. K. and Jensen, J. and Greczynski, G. and Czigány, Zsolt and Hultman, L. (2013) Reactive high power impulse magnetron sputtering of CFx thin films in mixed Ar/CF4 and Ar/C4F8 discharges. THIN SOLID FILMS, 542. pp. 21-30. ISSN 0040-6090

Schmidt, S. and Czigány, Zsolt and Greczynski, G. and Hultman, L. (2012) Ion Mass Spectrometry Investigations of the Discharge during Reactive High Power Pulsed and Direct Current Magnetron Sputtering of Carbon in Ar and Ar/N2. JOURNAL OF APPLIED PHYSICS, 112 (1). 013305. ISSN 0021-8979

Schmidt, S. and Greczynski, G. and Goyenola, C. and Gueorguiev, G. K. and Czigány, Zsolt (2011) CF(x) thin solid films deposited by high power impulse magnetron sputtering: Synthesis and characterization. SURFACE & COATINGS TECHNOLOGY, 206 (4). pp. 646-653. ISSN 0257-8972