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Items where Author is "Illhardt, Stefan"

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Talkenberg, Florian and Illhardt, Stefan and Radnóczi, György Zoltán and Pécz, Béla and Schmidl, Gabriele (2015) Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor–insulator–semiconductor heterojunction solar cell. JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A-VACUUM SURFACES AND FILMS, 33. 041101. ISSN 0734-2101

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