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Items where Author is "Lovics, Riku"

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Article

Hegedüs, Nikolett and Lovics, Riku and Serényi, Miklós and Zolnai, Zsolt and Petrik, Péter and Balázsi, Csaba and Balázsi, Katalin (2022) Interpretation of hydrogen incorporation into radio frequency sputtered amorphous silicon based on Berg modelling. VACUUM, 202. No.-111164. ISSN 0042-207X

Hegedüs, Nikolett and Lovics, Riku and Serényi, Miklós and Zolnai, Zsolt and Petrik, Péter and Mihály, Judit and Fogarassy, Zsolt and Balázsi, Csaba and Balázsi, Katalin (2021) Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films. COATINGS, 11 (1). pp. 1-13. ISSN 2079-6412

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