Items where Author is "Song, Yuan-Hong"

Article

Wang, Xiao-Kun and Masheyeva, Ranna and Liu, Yong-Xin and Song, Yuan-Hong and Hartmann, Péter and Donkó, Zoltán and Schulze, Julian (2024) Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 33. No. 085006. ISSN 0963-0252 (print); 1361-6595 (online)

Wang, Xiao-Kun and Korolov, Ihor and Wilczek, Sebastian and Masheyeva, Ranna and Liu, Yong-Xin and Song, Yuan-Hong and Hartmann, Péter and Donkó, Zoltán and Schulze, Julian (2024) Hysteresis in radio frequency capacitively coupled CF4 plasmas. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 33. No. 085001. ISSN 0963-0252 (print); 1361-6595 (online)

Wang, Li and Hartmann, Peter and Donkó, Zoltán and Song, Yuan-Hong and Schulze, Julian (2021) 2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 30. 054001. ISSN 0963-0252 (print); 1361-6595 (online)

Wang, Li and Hartmann, Péter and Donkó, Zoltán and Song, Yuan-Hong and Schulze, Julian (2021) Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 39 (6). No.-063004.

Wang, Li and Vass, Máté and Donkó, Zoltán and Hartmann, Péter and Derzsi, Aranka and Song, Yuan-Hong and Schulze, Julian (2021) Magnetic Attenuation of the Self-Excitation of the Plasma Series Resonance in Low-Pressure Capacitively Coupled Discharges. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 30 (10). pp. 1-6. ISSN 0963-0252 (print); 1361-6595 (online)