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Items where Author is "Szívós, J."
Group by: Item Type | No Grouping Jump to: Article Number of items: 1. ArticlePongrácz, A. and Szívós, J. and Ujhelyi, F. and Zolnai, Zs. and Sepsi, Ö. and Kun, Á. and Nádudvari, Gy. (2020) Tilt Angle and Dose Rate Monitoring of Low Energy Ion Implantation Processes with Photomodulated Reflectance Measurement : AM: Advanced Metrology. PROCEEDINGS OF THE 2020 31ST ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC). No.-19976691. ISSN 2376-6697 (In Press) |
