Browse by Funders

2023

Wang, Xiao-Kun and Masheyeva, Ranna and Liu, Yong-Xin and Hartmann, Péter and Schulze, Julian and Donkó, Zoltán (2023) The electrical asymmetry effect in electronegative CF4 capacitive RF plasmas operated in the striation mode. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 32. 085009. ISSN 0963-0252 (print); 1361-6595 (online)

2024

Wang, Xiao-Kun and Masheyeva, Ranna and Liu, Yong-Xin and Song, Yuan-Hong and Hartmann, Péter and Donkó, Zoltán and Schulze, Julian (2024) Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 33. No. 085006. ISSN 0963-0252 (print); 1361-6595 (online)

Wang, Xiao-Kun and Korolov, Ihor and Wilczek, Sebastian and Masheyeva, Ranna and Liu, Yong-Xin and Song, Yuan-Hong and Hartmann, Péter and Donkó, Zoltán and Schulze, Julian (2024) Hysteresis in radio frequency capacitively coupled CF4 plasmas. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 33. No. 085001. ISSN 0963-0252 (print); 1361-6595 (online)

Shi, De-Hua and Wang, Xiao-Kun and Liu, Yong-Xin and Donkó, Zoltán and Schulze, Julian and Wang, You-Nian (2024) An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 34. No. 025012. ISSN 0963-0252 (print); 1361-6595 (online)

2025

Luo, Lan-Yue and Donkó, Zoltán and Masheyeva, Ranna and Vass, Máté and Li, He-Ping and Hartmann, Péter (2025) The quenching effect of oxygen addition on an argon capacitively coupled plasma: experimental and computational study of the argon metastable atom kinetics. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 34. No. 015009. ISSN 0963-0252 (print); 1361-6595 (online)