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Schüngel, Edmund and Korolov, Ihor and Bruneau, B. and Derzsi, Aranka and Johnson, E. and O’Connell, D. and Gans, T. and Booth, J-P. and Donkó, Zoltán and Schulze, Julian (2016) Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 49. p. 265203. ISSN 0022-3727

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