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Article

Ďurian, Ján and Hartmann, Péter and Matejčík, Štefan and Gibson, Andrew R and Donkó, Zoltán (2022) Experimental and simulation study of a capacitively coupled radiofrequency plasma with a structured electrode. Plasma Sources Science and Technology, 31. No.-095001. ISSN 0963-0252 ; ESSN: 1361-6595

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