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Browse by Funders
Number of items: 4. 2022Wang, Xiao-Kun and Wang, Xiang-Yu and Liu, Yong-Xin and Schulze, Julian and Donkó, Zoltán and Wang, You-Nian (2022) Striations in dual-low-frequency (2/10 MHz) driven capacitively coupled CF4 plasmas. Plasma Sources Science and Technology, 31. No.-064002. ISSN 0963-0252 ; ESSN: 1361-6595 2023Wang, Xiao-Kun and Masheyeva, Ranna and Liu, Yong-Xin and Hartmann, Péter and Schulze, Julian and Donkó, Zoltán (2023) The electrical asymmetry effect in electronegative CF4 capacitive RF plasmas operated in the striation mode. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 32. 085009. ISSN 0963-0252 (print); 1361-6595 (online) 2024Wang, Xiao-Kun and Masheyeva, Ranna and Liu, Yong-Xin and Song, Yuan-Hong and Hartmann, Péter and Donkó, Zoltán and Schulze, Julian (2024) Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 33. No. 085006. ISSN 0963-0252 (print); 1361-6595 (online) Shi, De-Hua and Wang, Xiao-Kun and Liu, Yong-Xin and Donkó, Zoltán and Schulze, Julian and Wang, You-Nian (2024) An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 34. No. 025012. ISSN 0963-0252 (print); 1361-6595 (online) |
