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2024

Arellano, Fatima Jenina and Kusaba, Minoru and Wu, Stephen and Yoshida, Ryo and Donkó, Zoltán and Hartmann, Péter and Tsankov, Tsanko V. and Hamaguchi, Satoshi (2024) Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra. JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A-VACUUM SURFACES AND FILMS, 42 (5). No. 053001. ISSN 0734-2101

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