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2023

Park, Chan-Won and Horváth, Benedek and Derzsi, Aranka and Schulze, Julian and Kim, J. H. and Donkó, Zoltán and Lee, Hyo-Chang (2023) Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 32. p. 115003. ISSN 0963-0252 (print); 1361-6595 (online)

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