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Jump to: 26 April 2016
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26 April 2016

Bruneau, B. and Korolov, Ihor and Lafleur, T. and Gans, T. and O’Connell, D. and Greb, A. and Derzsi, Aranka and Donkó, Zoltán and Brandt, S. and Schüngel, Edmund and Schulze, Julian and Johnson, E. and Booth, J-P. (2016) Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas. Journal of Applied Physics, 119. p. 163301. ISSN 0021-8979 (print), 1089-7550 (online)

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