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Jump to: 29 June 2016
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29 June 2016

Brandt, S. and Berger, B. and Schüngel, Edmund and Korolov, Ihor and Derzsi, Aranka and Bruneau, B. and Johnson, E. and Lafleur, T. and O’Connell, D. and Koepke, M. and Gans, T. and Donkó, Zoltán and Schulze, Julian (2016) Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4. Plasma Sources Science and Technology, 25. 045015. ISSN 0963-0252 ; ESSN: 1361-6595

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