Nanopattern formation in UV laser treated a-AlOx and nc-Al/AlOx layers

Szívós, János and Serényi, Miklós and Gergely-Fülöp, Eszter and Lohner, Tivadar and Sáfrán, György (2014) Nanopattern formation in UV laser treated a-AlOx and nc-Al/AlOx layers. VACUUM, 109. pp. 200-205. ISSN 0042-207X

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Abstract

Hexagonal nanopatterns were fabricated in sputter deposited Al-oxide thin films by means of single UV laser pulses via a layer of self-assembled silica nanospheres. The hexagonal pattern was projected to the surface due to the focussing effect of the silica nanolenses enhancing the local impact of the pulse. As a result of the laser pulse large area ordered structure of nano-pits were formed in RF sputtered amorphous Al-oxide films, while nano-craters were created in DC sputter deposited layers that consist of Al nanocrystals embedded in amorphous matrix. The two different mechanisms governing the nanostructure formation in the a-AlOx and nc-Al/AlOx composite layers were revealed by Atomic Force Microscopy (AFM), cross-sectional Transmission Electron Microscopy (XTEM), spectroscopic ellipsometry and computer simulation.

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