Kárpáti, Tamás and Csikósné Pap, Andrea Edit and Kulinyi, Sándor (2013) Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing. Periodica Polytechnica Electrical Engineering, 57 (1). pp. 3-7. ISSN 0324-6000
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Official URL: http://www.pp.bme.hu/ee/article/view/2066/6172
| Item Type: | Article |
|---|---|
| Subjects: | T Technology / alkalmazott, műszaki tudományok > T2 Technology (General) / műszaki tudományok általában |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 20 Dec 2013 14:01 |
| Last Modified: | 23 Dec 2013 05:24 |
| URI: | http://real.mtak.hu/id/eprint/8245 |
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