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Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing.

Kárpáti, Tamás and Csikósné Pap, Andrea Edit and Kulinyi, Sándor (2013) Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing. Periodica Polytechnica Electrical Engineering, 57 (1). pp. 3-7. ISSN 0324-6000

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Item Type: Article
Subjects: T Technology / alkalmazott, műszaki tudományok > T2 Technology (General) / műszaki tudományok általában
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 20 Dec 2013 14:01
Last Modified: 23 Dec 2013 05:24
URI: http://real.mtak.hu/id/eprint/8245

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